LDU-Bench - Morphology Recognition: leaderboard

Metric: Macro-F1 (%; normal plus 11 defect morphology labels on the same 1,761 images; IC-SEM lithography and integrated-circuit review images; one zero-shot run per model at temperature 0 where exposed; invalid outputs stay in the denominator; deterministic scoring, no LLM judge). Source: arxiv.org. Saturation forecast: Around 2030. 6 models tracked.

Top models

#ModelScore
1GLM-5V Turbo40.8
2Claude Opus 4.626.6
3Qwen 3.6 Plus24.9
4MiniMax-M323.9
5GPT-5.420.1

Interactive version: theaggregate.ai/benchmark?slug=ldu-bench-morphology-recognition · How It Works · Data refreshed daily, snapshot 2026-09-26.